나노소재전자소자 연구실
 위치안내 |
공대6호관 206호 |
|---|---|
 지도교수 |
이영환 교수 |
| 주요연구분야 |
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 연구실소개 |
Research interests in our group include understanding the fundamental relationships of structure-property-processing in functional materials such as dielectric, ferroelectric, antiferroelectric, and piezoelectric materials and developing such relationships based on materials science and engineering. In particular, our group focuses on depositing insulator layer in metal-oxide-semiconductor field-effect-transistor (MOSFET) device and/or metal-insulator-metal (MIM) capacitor with multifunctional thin films such as ferroelectric HfO2 or ZrO2. In addition, various materials properties are characterized by advanced characterization tools such as X-ray photoelectronc spectroscopy, time-of-flight secondary ion mass spectrometry, transmission electron microscopy, in situ X-ray diffraction and synchrotron-based X-ray scattering. |
